Location: Room 305, High-energy Optics and Electronics Lab (HOPE lab), National Tsinghua University, Hsinchu, Taiwan

Opening hours: Monday to Friday 9:00-19:00 (In case of necessity, you can discuss with administrator for using clear room outside the opening hours)

Equipment: Mask Aligner, Spectrophotometer, HOOD, Oven, Spin Coater, Microscope, DI water, N2 gas, Ultrasonic Cleaner, Hot plate

Administrator:

Szu-An Tsao(曹斯安)

Email : satsao@mx.nthu.edu.tw

Tel: +886-3-5162333

Manufacturer: BRANCHY

Service: 

• We provide sample coating services by using E-beam or Sputtering evaporations. 
• High reflective coatings (HR) and Anti-Reflective coating (AR). 

Contact: 

• Mr. Alexey Kopeykin

​Email: a.kopeykin@gapp.nthu.edu.tw

Phone: +886-3-5162333

Service:

• We provide sample coating services by using E-beam evaporations.
• High reflective coatings (HR) and Anti-Reflective coating (AR).

Contact: 

• Mr. Alexey Kopeykin

​Email: a.kopeykin@gapp.nthu.edu.tw

Phone: +886-3-5162333

Manufacturer: Deya Optronic Co. (德揚光電)

Service:

• We provide services to transfer a geometric pattern from a photomask to a photoresist on the substrate. The minimum line width can reach 1um.

• The 5” square photomasks with the period is from 1um to 31um are available in our lab.

Contact: 

• Mr. Alexey Kopeykin

​Email: a.kopeykin@gapp.nthu.edu.tw

Phone: +886-3-5162333

Service:

• We provide cut through or surface cutting by using Disco dicing blades.

• Email discussing with Assistant Roger Lei is suggested.(Free)

Contact: 

• Assistant Roger Lei

​Email: lthuang2001@gapp.nthu.edu.tw

Phone: +886-3-5162332